JPH0359569B2 - - Google Patents

Info

Publication number
JPH0359569B2
JPH0359569B2 JP56199826A JP19982681A JPH0359569B2 JP H0359569 B2 JPH0359569 B2 JP H0359569B2 JP 56199826 A JP56199826 A JP 56199826A JP 19982681 A JP19982681 A JP 19982681A JP H0359569 B2 JPH0359569 B2 JP H0359569B2
Authority
JP
Japan
Prior art keywords
ray
pattern
monochromator
transfer
absorber pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56199826A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58101426A (ja
Inventor
Junji Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP56199826A priority Critical patent/JPS58101426A/ja
Publication of JPS58101426A publication Critical patent/JPS58101426A/ja
Publication of JPH0359569B2 publication Critical patent/JPH0359569B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP56199826A 1981-12-11 1981-12-11 Ｘ線露光装置 Granted JPS58101426A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56199826A JPS58101426A (ja) 1981-12-11 1981-12-11 Ｘ線露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56199826A JPS58101426A (ja) 1981-12-11 1981-12-11 Ｘ線露光装置

Publications (2)

Publication Number Publication Date
JPS58101426A JPS58101426A (ja) 1983-06-16
JPH0359569B2 true JPH0359569B2 (en]) 1991-09-11

Family

ID=16414280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56199826A Granted JPS58101426A (ja) 1981-12-11 1981-12-11 Ｘ線露光装置

Country Status (1)

Country Link
JP (1) JPS58101426A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629632A (ja) * 1985-07-06 1987-01-17 Agency Of Ind Science & Technol 投影露光装置
JPS62208631A (ja) * 1986-03-07 1987-09-12 Sanyo Electric Co Ltd 縮小型ｘ線リソグラフイ装置
DE3752388T2 (de) * 1986-07-11 2006-10-19 Canon K.K. Verkleinerndes Projektionsbelichtungssystem des Reflexionstyps für Röntgenstrahlung
JP2688958B2 (ja) * 1988-12-05 1997-12-10 三菱電機株式会社 露光装置およびその露光方法

Also Published As

Publication number Publication date
JPS58101426A (ja) 1983-06-16

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